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<https://d-nb.info/1328689999> a bibo:Issue;
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  rdau:P60327 "by M. V. Zorina, S. A. Kraev, A. Ya. Lopatin, M. S. Mikhailenko, A. I. Okhapkin, A. A. Perekalov, A. E. Pestov, A. K. Chernyshev, N. I. Chkhalo, I. I. Kuznetsov";
  dc:title "On the Formation of an Anti-Reflection Layer on the Surface of Single-Crystal Silicon by Ion-Beam Etching";
  dcterms:creator _:node1k0rmm5k0x128898086 .

_:node1k0rmm5k0x128898086 gndo:preferredName "Zorina, M. V." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898087 .

_:node1k0rmm5k0x128898087 gndo:preferredName "Zorina, M. V." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898088 .

_:node1k0rmm5k0x128898088 gndo:preferredName "Kraev, S. A." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898089 .

_:node1k0rmm5k0x128898089 gndo:preferredName "Lopatin, A. Ya" .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898090 .

_:node1k0rmm5k0x128898090 gndo:preferredName "Mikhailenko, M. S." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898091 .

_:node1k0rmm5k0x128898091 gndo:preferredName "Okhapkin, A. I." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898092 .

_:node1k0rmm5k0x128898092 gndo:preferredName "Perekalov, A. A." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898093 .

_:node1k0rmm5k0x128898093 gndo:preferredName "Pestov, A. E." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898094 .

_:node1k0rmm5k0x128898094 gndo:preferredName "Chernyshev, A. K." .

<https://d-nb.info/1328689999> marcRole:aut _:node1k0rmm5k0x128898095 .

_:node1k0rmm5k0x128898095 gndo:preferredName "Chkhalo, N. I." .

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_:node1k0rmm5k0x128898096 gndo:preferredName "Kuznetsov, I. I." .

<https://d-nb.info/1328689999> marcRole:oth _:node1k0rmm5k0x128898097 .

_:node1k0rmm5k0x128898097 gndo:preferredName "SpringerLink (Online service)" .

<https://d-nb.info/1328689999> bibo:pageStart "S259";
  bibo:pageEnd "S264";
  dcterms:isPartOf <https://ld.zdb-services.de/resource/2389417-9>;
  wdrs:describedby <https://d-nb.info/1328689999/about> .

<https://d-nb.info/1328689999/about> dcterms:license <http://creativecommons.org/publicdomain/zero/1.0/>;
  dcterms:modified "2024-05-09T05:32:34.000"^^xsd:dateTime .

<https://d-nb.info/1328689999> dcterms:issued "2023";
  bibo:issue "17.2024, 1";
  owl:sameAs <http://hub.culturegraph.org/resource/DNB-1328689999> .